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Announced first commercial placement of Cee 300MXD megasonic developer
May 27, 2014
By: DAVID SAVASTANO
Editor, Ink World Magazine
Brewer Science announced the first commercial placement of a Cee 300MXD megasonic developer, which was commissioned by MicroChem Corp. The Brewer Science Cee 300MXD megasonic developer applies uniform acoustic energy to spinning substrates to gently dissolve and remove films and residues without damaging fragile device structures. This precision handling results in stable dimensional control of vertical profiles uniformly across the wafer surface, enabling fabrication of high-aspect-ratio str...
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